Electrical resistance compositions and methods of making the same

ABSTRACT

A composition for making electrical resistance elements including a conductive component which comprises 
     (a) a precious metal oxide of the formula A&#39; 1-x  A&#34; x  B&#39; 1-y  B&#34; y  O 3 , wherein when A&#39; is Sr; A&#34; is one or more of Ba, La, Y, Ca and Na, and when A&#39; is Ba, A&#34; is one or more of Sr, La, Y, Ca and Na; B&#39; is Ru; B&#34; is one or more of Ti, Cd, Zr, V and Co, O&lt;x&lt;0.2; O&lt;y&lt;0.2; 
     (b) a binder component which comprises 
     (i) between 40 weight percent and 75 weight percent C&#39;, wherein C&#39; is SrO when A&#39; is Sr, C&#39; is BaO when A&#39; is Ba, and C&#39; is SrO+BaO when A&#39; is Sr and A&#34; is Ba and when A&#39; is Ba and A&#34; is Sr, 
     (ii) between 20 weight percent and 35 weight percent B 2  O 3 , 
     (iii) between 2 weight percent and 12 weight percent SiO 2 , and 
     (iv) between 0.5 weight percent and 6.5 weight percent ZnO. The method of the present invention includes mixing the conductive component and binder as described above with an organic vehicle.

BACKGROUND OF THE INVENTION

The present invention concerns electrical resistance elements and, in particular, compositions for making electrical resistance elements and methods of making the same.

Electrical resistance elements formed from certain compositions are particularly useful in producing microminiature circuitry for the electronics industry wherein electronic elements (or pastes) are screen printed onto substances.

U.S. Pat. No. 3,304,199 describes an electrical resistance element composed of a mixture of RuO₂ or IrO₂ and lead borosilicate glass. The mixture is combined with a vehicle, e.g., organic screening agent, such as ethyl cellulose dissolved in acetone-toluene. The resultant mixture containing the vehicle is applied onto a nonconductive substrate and then air fired.

U.S. Pat. No. 3,324,049 describes a cermet resistance material comprising 40 to 99 weight percent of a lead borosilicate glass, 0.5 to 20 weight percent of a noble metal such as Ag, Au, Pd, Pt, Rh, Ir, Os or Ru and 0.5 to 40 weight percent MnO₂ or CuO. The resultant resistance material is then fired in air.

U.S. Pat. No. 3,655,440 concerns a resistance composition including RuO₂, IrO₂ or PdO, a lead borosilicate glass vitreous binder and an electrically nonconductive crystal growth controlling agent, e.g., alumina comprising submicron inert particles. Such resistance composition is air fired at 975° C. to 1025° C. for 45 minutes to 1 hour.

U.S. Pat. No. 3,682,840 concerns electrical resistor compositions containing lead ruthenate and mixtures thereof with RuO₂, in conjunction with lead borosilicate binders.

U.S. Pat. No. 4,065,743 concerns a vitreous enamel resistor containing a glass frit and conductive particles. Such conductive particles include tin oxide and tantalum oxide.

U.S. Pat. No. 4,101,708 is directed to printable compositions of finely divided powder in an inert liquid vehicle for producing film resistors adherent to a dielectric substrate, such compositions including RuO₂, glass containing PbO, Nb₂ O₅, CaF₂ and an inert vehicle.

German Patentschrift 21 15 814 concerns a resistance paste for air firing on a ceramic. Such resistance paste includes BaRuO₃, SrRuO₃ and CaRuO₃ in a lead borosilicate glass.

Resistor compositions have been made using Ag-Pd and/or PdO, RuO₂, IrO₂, and the so-called "du Pont" pyrochlores. The pyrochlore structures are complex oxides with the general formula A₂ B₂ O₆₋₇ where the large cation A is in eightfold coordination and the smaller B cation is octahedrally coordinated. Their success is largely based on their stability in variable atmospheres (reducing) and their ability for handling multisubstitution of elements to alter electrical properties. Examples of pyrochlores specifically used in these compositions and discussed in U.S. Pat. Nos. 3,553,109; 3,560,410 and 3,583,931 (all of these patents involve lead borosilicate binders) include Bi₂ Ru₂ O₇ and Pb₂ Ru₂ O_(7-x) where O<x<1.

The resistivities of various precious metal oxides (including primarily pyrochlores and some perovskites) were tabulated by Bube, K., Proceedings of Inter. Microel. Symp., Oct. 30-Nov. 1, 1972, Washington, D.C., ISHM, as follows:

    ______________________________________                                         Oxide          ρ300° K.'.sup.Ω-cm                             ______________________________________                                         Rutile                                                                         RuO.sub.2      3.5 × 10.sup.-5                                           IrO.sub.2      4.9 × 10.sup.-5                                           Rh.sub.2 O.sub.3                                                                              <10.sup.-4                                                      Pyrochlore                                                                     Bi.sub.2 Ru.sub.2 O.sub.7                                                                     2.3 × 10.sup.-2                                           Bi.sub.2 Rh.sub.2 O.sub.6.8                                                                   3.2 × 20.sup.-3                                           Bi.sub.2 Ir.sub.2 O.sub.7                                                                     1.5 × 10.sup.-3                                           Pb.sub.2 Ru.sub.2 O.sub.6                                                                     2.0 × 10.sup.-2                                           Pb.sub.2 Ru.sub.2 O.sub.6.5                                                                   5.0 × 10.sup.-4                                           Pb.sub.2 Rh.sub.2 O.sub.7                                                                     6.0 × 10.sup.-1                                           Pb.sub.2 Ir.sub.2 O.sub.6.5                                                                   1.5 × 10.sup.-4                                           Pb.sub.2 Os.sub.2 O.sub.7                                                                     4.0 × 10.sup.-4                                           Tl.sub.2 Ru.sub.2 O.sub.7                                                                     1.5 × 10.sup.-2                                           Tl.sub.2 Ir.sub.2 O.sub.7                                                                     1.5 × 10.sup.-3                                           Tl.sub.2 Rh.sub.2 O.sub.7                                                                     6.0 × 10.sup.-4                                           Tl.sub.2 Os.sub.2 O.sub.7                                                                     1.8 × 10.sup.-4                                           Perovskite                                                                     LaRuO.sub.3    4.5 × 10.sup.-3                                           La.sub..5 Sr.sub..5 RuO.sub.3                                                                 5.6 × 10.sup.-3                                           CaRuO.sub.3    3.7 × 10.sup.-3                                           SrRuO.sub.3    2.0 × 10.sup.-3                                           BaRuO.sub.3    1.8 × 10.sup.-2                                           ______________________________________                                    

The perovskite crystal structure was described in Goldsmith, U. M., Skrifter Norske Videnskaps--Akad., Oslo, I: Mat. Nuturv.Kl. 2:8 (1926). In the perovskite composition of ABO₃ the A cation is in twelve-fold coordination with oxygen and the smaller B cation is in octahedral coordination. This perovskite structure is one of high lattice energy and is generally a very stable structure.

Resistance compositions have been applied in screen printing techniques requiring firing in an oxidizing (air) atmosphere which necessitated the use of expensive noble metals such as Au, Ag, Pt and Pd. Less expensive copper as a base metal could not be employed since copper easily oxidizes. Accordingly, there is a need for a stable copper compatible resistance composition that could be fired in non-oxidizing atmospheres, e.g., nitrogen.

Typical previously employed resistance compositions utilized lead borosilicate glass binders. After firing in air, resistance compositions including, for example, strontium ruthenate in a lead borosilicate binder, the strontium would decompose to strontium oxide, which dissolves into the binder, and ruthenium oxide. In the present invention when, for example, strontium ruthenate in a strontium borosilicate binder is fired in nitrogen, there is no decomposition of the conductive component, i.e., the strontium ruthenate remains unchanged.

SUMMARY OF THE INVENTION

One object of the present invention is to provide stable copper compatible resistance compositions that can be fired in non-oxidizing atmospheres.

Another object of the present invention is to provide a thick film resistor system which exhibits property reproducibility and reduced processing sensitivity.

The present invention concerns a composition for making electrical resistance elements composed of an electrically conductive component and a binder component.

The conductive component includes a precious metal oxide of the formula A'_(1-x) A"_(x) B'_(1-y) B"_(y) O₃, wherein when A' is Sr, A" is one or more of Ba, La, Y, Ca and Na, and when A' is Ba, A" is one or more of Sr, La, Y, Ca and Na; B' is Ru; B" is one or more of Ti, Cd, Zr, V and Co; O<x<0.2; and 0<y<0.2.

The binder component includes:

between 40 weight percent and 75 weight percent C', wherein C' is SrO when A' is Sr, C' is BaO when A' is Ba and C' is SrO+BaO when A' is Sr and A" is Ba and when A' is Ba and A" is Sr;

between 20 weight percent and 35 weight percent B₂ O₃,

between 2 weight percent and 15 weight percent SiO₂, and

between 0.5 weight percent and 6.5 weight percent ZnO.

The present invention also concerns a method of preparing a composition for making an electrical resistor. Such method includes combining a conductive component of the formula A'_(1-x) A"_(x) B'_(1-y) B"_(y) O₃ wherein when A' is Sr, A" is one or more of Ba, La, Y, Ca and Na, and when A' is Ba, A" is one or more of Sr, La, Y, Ca and Na; B' is Ru; B" is one or more of Ti, Cd, Zr, V and Co; O<x<0.2; O<y<0.2; a binder having 40 to 75 weight percent C' (C' as defined hereinabove), 20 to 35 weight percent B₂ O₃, 2 to 15 weight percent SiO₂, and 0.5 to 6.5 weight percent ZnO, and an organic vehicle to form a paste.

The binder component can also include between 0.1 and 2.5 weight percent Al₂ O₃.

The binder component can further include between 0.1 weight percent and 1.5 weight percent each of one or more of Bi₂ O₃, CuO, MgO, or Nb₂ O₅.

The binder component can also further include between 0.1 weight percent and 1.5 weight percent TiO₂ or NaF. The binder component may also further include between 5 weight percent and 15 weight percent CaO.

DETAILED DESCRIPTION OF THE INVENTION

The compositon for making electrical resistance elements of the present invention includes a conductive metal oxide perovskite component and a glass binder component.

The conductive component is represented by the formula A'_(1-x) A"_(x) B'_(1-y) B"_(y) O₃ wherein when A' is Sr; A" is one or more of Ba, La, Y, Ca, and Na, and when A' is Ba, A" is one or more of sr, La, Y, Ca and Na; B' is Ru; B" is one or more of Ti, Cd, Zr, V and Co; O<x<0.2; and O<y<0.2. Preferred combinations of B'_(1-y) B"_(y) include Ru₀.8 Ti₀.2 and Ru₀.9 Ti₀.1. Preferred conductive components include SrRu₀.8 Ti₀.2 O₃, SrRuO₃ and SrRu₀.9 Ti₀.1 O₃. Combinations of these components may also be used, such as SrRuO₃ +SrRu₀.8 Ti₀.2 O₃ or SrRuO₃ +SrRu₀.9 Ti₀.1 O₃. Other non-limiting examples of conductive components include SrRu₀.95 Cd₀.05 O₃, Sr₀.90 Na₀.10 RuO₃, Sr₀.90 Y₀.10 RuO₃, Sr₀.80 Na₀.10 La₀.10 RuO₃ and SrRu₀.8 Ti₀.2 O₃ /SrRuO₃, SrRu₀.8 Zr₀.2 O₃, SrRu₀.9 Zr₀.1 O₃, SrRu₀.75 V₀.25 O₃ and SrRu₀.8 Co₀.2 O₃.

The formula A'_(1-x) A"_(x) B'_(1-y) B"_(y) O₃ can be altered by partial substitutions of A, B or A and B (A is A'+A"; B is B'+B"), such as described above and by using other substitutions. Non-limiting examples of substitutions (based on ionic radii and valency) on the A or B sites are as follows:

    ______________________________________                                                A.sup.2+  site                                                                               B.sup.4+  site                                            ______________________________________                                                K.sup.+       Sc.sup.3+                                                        Cu.sup.+      Mn.sup.3+                                                        Ag.sup.+      Fe.sup.3+                                                        Ce.sup.3+     Ta.sup.5+                                                        Nd.sup.3+     Al.sup.3+                                                        Sm.sup.3+     Gd.sup.3+                                                        Mg.sup.2+     Bi.sup.3+                                                                      Nb.sup.5+                                                                      Sb.sup.5+                                                                      Mo.sup.6+                                                                      W.sup.6+                                                  ______________________________________                                    

The binder component of the present invention has as its major constituents C', i.e., SrO or BaO or SrO+BaO; B₂ O₃ ; SiO₂ ; and ZnO in the following amounts:

    ______________________________________                                         Constituent                                                                             Weight % Range                                                                               Preferred Wt. % Range                                   ______________________________________                                         C'       40 to 75      42 to 58                                                B.sub.2 O.sub.3                                                                         20 to 35      27 to 31                                                SiO.sub.2                                                                                2 to 15       7 to 11                                                ZnO      0.5 to 6.5    2 to 4                                                  ______________________________________                                    

Additionally, the binder component may have included therein one or more of the following constituents:

    ______________________________________                                         Constituent                                                                             Weight % Range                                                                               Preferred Wt. % Range                                   ______________________________________                                         Al.sub.2 O.sub.3                                                                        0.1 to 2.5    0.5 to 15                                               Bi.sub.2 O.sub.3                                                                        0.1 to 1.5    0.4 to 1                                                CuO      0.1 to 1.5    0.3 to 0.8                                              MgO      0.1 to 1.5    0.4 to 0.8                                              Nb.sub.2 O.sub.5                                                                        0.1 to 1.5    0.3 to 0.8                                              NaF      0.1 to 1.5    0.2 to 0.9                                              TiO.sub.2                                                                               0.1 to 1.5    0.2 to 0.6                                              ______________________________________                                    

Non-limiting examples of preferred binder component formulations include the following:

    ______________________________________                                                   Formula-     Formula- Formula-                                                 tion I       tion II  tion III                                       Component Wt. %        Wt. %    Wt. %                                          ______________________________________                                         SrO       51.7         55.2     56.6                                           B.sub.2 O.sub.3                                                                          30.0         30.0     30.1                                           SiO.sub.2 10.5         7.0      7.1                                            Al.sub.2 O.sub.3                                                                         1.1          1.1      0.5                                            ZnO       3.4          3.4      3.4                                            Bi.sub.2 O.sub.3                                                                         0.5          0.5      0.5                                            CuO       0.6          0.6      0.6                                            MgO       0.7          0.7      0.7                                            Nb.sub.2 O.sub.5                                                                         0.5          0.5      0.5                                            NaF       0.5          0.5      --                                             TiO.sub.2 0.5          0.5      --                                             ______________________________________                                    

Examples of other non-limiting examples of binder formulations include the following:

    ______________________________________                                         Component                                                                              Wt. %    Wt. %    Wt. %  Wt. %  Wt. %                                  ______________________________________                                         SrO     51.7     52.2     53.2   42.2   54.7                                   B.sub.2 O.sub.3                                                                        30.1     30.0     30.0   30.0   30.0                                   SiO.sub.2                                                                              10.5     10.0     9.0    7.5    7.5                                    Al.sub.2 O.sub.3                                                                       1.1      1.1      1.1    1.1    1.1                                    ZnO     3.4      3.4      3.4    3.4    3.4                                    Bi.sub.2 O.sub.3                                                                       0.5      0.5      0.5    0.5    0.5                                    CuO     0.6      0.6      0.6    0.6    0.6                                    TiO.sub.2                                                                              --       0.5      0.5    0.5    0.5                                    MgO     1.1      0.7      0.7    0.7    0.7                                    Nb.sub.2 O.sub.5                                                                       0.5      0.5      0.5    0.5    0.5                                    NaF     0.5      0.5      0.5    0.5    0.5                                    CaO     --       --       --     12.5   --                                     ______________________________________                                    

The weight percent loading of binder component/conductive component can vary from 25 wt.% to 75 wt.% binder/75 wt.% to 25 wt.% conductive component, i.e., wt.% binder can be, for example, 30 wt.%, 35 wt.%, 40 wt.%, 50 wt.%, 60 wt.%, 65 wt.% and 70 wt.%.

The binder component and conductive component are mixed together with a suitable "organic vehicle". An organic vehicle is a medium which volatilizes at a fairly low temperature (approximately 400° C.-500° C.), without causing reduction of other paste components. An organic vehicle acts as a transfer medium for screen printing. An organic vehicle for use in the present invention is preferably a resin, e.g., an acrylic ester resin, preferably an isobutyl methacrylate, and a solvent, e.g., an alcohol, preferably tri-decyl alcohol ("TDA"). The resin can be any polymer which depolymerizes at or below 400° C. in nitrogen. Other solvents that can be employed are terpineol or "TEXANOL" of Eastman Kodak. The solvent for utilization in the present invention can be any solvent which dissolves the respective resin and which exhibits a suitable vapor pressure consistent with subsequent milling and screen printing. In a preferred embodiment, the organic vehicle is 10 to 30 weight percent isobutyl methacrylate and 90 to 70 weight percent TDA.

The binder component, conductive component and organic vehicle are mixed, screen printed on Cu termination on a suitable substrate, e.g., 96% Al₂ O₃ and then fired in a nitrogen atmosphere at a high temperature, e.g., 900° C., for a suitable period of time, e.g., 7 minutes.

In preparing compositions for making electrical resistance elements according to the present invention, the conductive component, binder component and organic vehicle are combined to form a paste. The paste is then milled to the required fineness for screen printing techniques.

Without wishing to be bound by any particular theory of operability, it is believed that the binder component (glass matrix) of the present invention prevents decomposition of the conductive component during firing, i.e., the crystal structure (physical) and chemical composition of the conductive component remains stable and unchanged during firing.

EXAMPLES Example 1--Binder Preparation

Binders were synthesized utilizing reagent grade raw materials, each in the oxide form with the exception of strontium, barium and copper compounds which were in the carbonate form. When the composition was formulated, the individual components were weighed and homogenized for one (1) hour in a V-blender (which is a dry blending operation). After the blending was complete, the homogenized powders were poured into kyanite crucibles in which they would be subsequently melted. The binders were preheated for one (1) hour at 600° C. and then transferred to another furnace where they were melted typically in range of 1100° C. to 1300° C. for 1 to 1.5 hours. The molten material was removed from the furnace at the melting temperature and poured (fritted) into stainless steel buckets filled with deionized water. As the molten stream made contact with the water, solidification and disintegration into glass chunks (size dictated by thermal stresses) occurred. The deionized water was decanted and the glass was placed in a ceramic jar mill with alumina grinding cylinders and an isopropyl alcohol medium. The glasses were ball milled for 24 hours and then wet-sieved through a 200 mesh screen. After drying in a room temperature convection explosion-proof oven, the powders were ready for characterization and incorporation into resistor pastes. The powders ranged in particle size from 1 to 2 μm. Binders prepared as described in the foregoing procedure are those previously identified as Formulations I, II and III. The softening points for Formulations I, II and III were found to be, respectively, 625° C., 635° C. and 660° C. Other binder formulations prepared according to Example 1 include the following:

    ______________________________________                                                                            Form. Form.                                         Form. IV  Form. V  Form. VI                                                                               VII   VIII                                  Component                                                                              wt. %     wt. %    wt .%   wt. % wt. %                                 ______________________________________                                         BaO     53.6      66.6     66.6    68.6  66.6                                  SrO     15.0      --       --      --    --                                    B.sub.2 O.sub.3                                                                        19.2      18.2     23.4    17.2  17.2                                  SiO.sub.2                                                                              8.0       8.2       8.0    9.2   11.2                                  Al.sub.2 O.sub.3                                                                       --        --        2.0    2.0   --                                    ZnO     3.0       5.0      --      1.0    5.0                                  TiO.sub.2                                                                              0.4       0.8      --      --    --                                    CuO     0.8       0.6      --      1.0   --                                    Bi.sub.2 O.sub.3                                                                       --        0.6      --      1.0   --                                    ______________________________________                                    

Example 2--Conductive Component Preparation

Conductive components were prepared by formulating the respective compound (e.g., SrRuO₃), calculating the equimolar amounts of, for example, SrCO₃ and RuO₂ which must be weighted in order to ensure stoichiometry, and finally weighing the individual components. Correction factors for Ru metal content, water content, and other volatile components lost on ignition at 600° C. are also incorporated into the calculation. A similar correction factor for loss on ignition was incorporated into calculations for the weights of other components, if necessary. The RuO₂ had a surface area greater than 70 m² /g, while the other constituents were less than 5 m² /g. The weighed raw materials were ball milled for two (2) hours in ceramic jar mills with alumina grinding media and deionized water, thus, creating a wet milling process. After 2 hours, the homogenized slurry was poured into stainless steel trays and dried for 24 hours at 80° C. The dried blend was passed through an 80 mesh screen prior to calcination.

The meshed powders were calcined in high purity alumina crucibles (99.8% purity) with the cycle being precisely microprocessor-controlled. The heat-up and cool-down rates were not per se critical, but were generally 500° C./hour. The hold times at the respective temperatures (from 800° C. to 1200° C. depending on the compound) varied from one (1) hour to two (2) hours. When the calcination was complete, the powders were milled in a Sweeco-vibratory mill for two (2) hours. This is a high energy milling procedure which utilized alumina grinding media and an isopropyl alcohol medium. The perovskites were wet sieved (200 mesh) at the end of the cycle, dried at room temperature in a convection oven (explosion proof), and prepared for characterization and incorporation into resistor pastes.

Conductive components prepared according to the foregoing procedure included the following:

    ______________________________________                                                                  Calcination Conditions                                Designation                                                                               Composition   (°C./Hour)                                     ______________________________________                                         Composition I                                                                             SrRu.sub..8 Ti.sub..2 O.sub.3                                                                1200° C./2 hours                               Composition II                                                                            SrRuO.sub.3   1000° C./2 hours                               Composition III                                                                           SrRuO.sub.3    800° C./1 hours                               Composition IV                                                                            SrRu.sub..9 Ti.sub..1 O.sub.3                                                                1200° C./1 hours                               Composition V                                                                             SrRu.sub..8 Ti.sub..1 Zr.sub..1 O.sub.3                                                      1200° C./2 hours                               ______________________________________                                    

Example 3--Combination of Binders and Conductive Components

The binders as prepared in accordance with Example 1 hereinabove were combined with conductive components prepared in accordance with Example 3 hereinabove, along with an organic vehicle. The organic vehicle utilized was "ACRYLOID" B67 a resin (an isobutyl methacrylate) produced by Rohm & Haas of Philadelphia, Pa., and tri-decyl alcohol ("TDA") in a 30/70 wt.% ratio.

The respective binders, conductive components, and organic vehicle were weighted to make the desired paste blends. The solids content (binder plus conductive phase) was maintained at 70 wt.% of the total paste weight. The pastes were three-roll milled to a fineness of grind of <10 μm. Resistor test patterns were screen printed with the following print thicknesses: wet, 29-32 μm; fired, 10-13 μm. The pastes were then printed through either a 325 mesh screen with 0.6 mil-emulsion or a 280 mesh screen with a 0.5 mil-emulsion. The wet prints were dried at 150° C. for 5-10 minutes prior to firing.

The firing profile was dependent on the binder constituent. For example, pastes containing Formulation I were fired at 850° C., while Formulations II and III were fired at 900° C. The 850° C. profile length was 58 minutes from 100° C. to 100° C., i.e., from furnace entrance to furnace exit. The heating rate was 45° C./minute, the cooling rate was 60° C./minute, and the dwell time at peak temperature was 10 minutes. The 900° C. profile had a duration of 55 minutes from 100° C. to 100° C., a heating rate of 50° C./minute, and a cooling rate of 60° C./minute. The time at peak temperature was varied from 5 to 14 minutes.

Various combinations of the aforementioned binder formulations and conductive components to form resistor elements and their resultant properties after firing in nitrogen are given hereinbelow in Tables I and II. In Table II, nitrogen firing in 850° C. was utilized.

    TABLE I       BASIC ELECTRICAL PROPERTIES OF RESISTORS FIRED IN NITROGEN  WT %      LOADING ρs (CV) HTCR    LASER TRIM 85° C./85% RH 150°      C. Calc. Firing   BINDER/COND. (Ω/□) CTCR ΔTCR      VCR DRIFT (24 hr) % ΔR % ΔR Conds. Temp. Noise BINDER//COMP.      COMP. (ppm/°C.) (ppm/°C.) (ppm/°C.) (ppm/V/inch) %      ΔR (120 hr) (120 hr) (°C./hr) (°C.) (dB)        FORMULATION I//COMPOSITION II 500 (6) +400 +390 10     1000/2 850 -4      60//40 FORMULATION I//COMPOSITION II/ 5k (8) +290 +280 10 -5  0.4 .2 .5      1000/2 850 +5 COMPOSITION I         1200/2 60//30//10 FORMULATION      I//COMPOSITION II/ 20K (7) +140 +125 15 -20 0.5 .2 .5 1000/2 850 +13.7      COMPOSITION I         1200/2 60//25/15 FORMULATION I//COMPOSITION I 500k      (12) -120 -200 80     1200/2 850 60//40 FORMULATION I//COMPOSITION II      120        1000/2 850 -14.4 30//70 FORMULATION I//COMPOSTION II 900k      (35) +250 +290 40     1000/2 850 70//30 FORMULATION III//COMPOSITION III      2k (8) +650 +750 100      800/1 900 60//40 FORMULATION III//COMPOSITION      II 3.5k (12) +485 +415 70 -8        1.00 1.29 .12 1000/2 900 60//40 FORMULATION III//COMPOSITION II 900      (8) +750 +675 75  .15 .57 .20 1000/2 900 -4.5 50//50 FORMULATION      III//COMPOSITION II 95 (2) +900 +650 250     1000/2 900 30//70 FORMULATIO      N III//COMPOSITION I 45k (4) -275 -550 275     1200/2 900 +11.3 70//30      FORMULATION III//COMPOSITION I 40k (4)        1200/2 900 -14.7 60//40      FORMULATION III//COMPOSITION I 20k (9) -300 -560 260     1200/2 900 +9.0      50//50 FORMULATION III//COMPOSITION I 11k (4) -240 -490 250     1200/2      900 +8.2 40//60 FORMULATION III//COMPOSITION I 400 (5) +180 + 380 200       1200/2 900 -12.5 30//70 FORMULATION III//COMPOSITION I 62k (2) -230      -440 210     1200/2 900 +6.4 60//40 FORMULATION III//COMPOSITION I 20k      (3) -185 -360 175     1200/2 900 -15.5 40//60 FORMULATION III//COMPOSITIO      N IV 70k (11) +70  +50        20     1200/2 900 70//30 FORMULATION III//COMPOSITION IV 37k (6) +60      +30  30     1200/1 900 6.8 60//40 FORMULATION III//COMPOSITION IV 19k      (3) +70  +50  20     1200/1 900 5.4 50//50 FORMULATION III//COMPOSITION      IV 2.6k        1200/1 900 -1.8 40//60 FORMULATION III//COMPOSITION IV      147 (2) +600 +630 30     1200/1 900 30//70 FORMULATION III//COMPOSITION      II 120 (4) +750 +875 125     1200/2 900 35//65 FORMULATION III//COMPOSITI      ON II 2.5k (10) +350 +400 50     1000/2 900 40//60 FORMULATION III//COMPO      SITION II 20k +190 +250 60     1000/2 900 +9 50//50 FORMULATION III//COMP      OSITION II 100k (10) +80  +90  10 -20    1000/2 900 60//40 FORMULATION      III//COMPOSITION V 320 (1) +615 +540 75     1200/2 900 30//70      GLOSSARY      ρs = sheet resistance      HTCR = hot temperature coefficient of resistance      CTCR = cold temperature coefficeint of resistance      TCR = temperature coefficient of resistance      ΔTCR = the absolute difference of HTCR and CTCR      VCR = voltage coefficient of resistance      (CV) = coefficient of variation expressed as percent

                                      TABLE II                                     __________________________________________________________________________                           FIRING  ρs                                           BINDER//CONDUCTIVE COMPONENT                                                                         CONDITIONS                                                                             Ω/□                                                              HTCR                                                                               CTCR                                                                               ΔTCR                            __________________________________________________________________________     FORMULATION VIII//BaRuO.sub.3                                                                        N.sub.2 @ 900° C.                                                               2K +400                                                                               +100                                                                               300                                   50//50                                                                         FORMULATION VIII//BaRu.sub..9 Ti.sub..1 O.sub.3                                                      N.sub.2 @ 900° C.                                                               5K -300                                                                               -800                                                                               500                                   50//50                                                                         FORMULATION VIII//BaRu.sub..9 Zr.sub..1 O.sub.3                                                      N.sub.2 @ 900° C.                                                               20K                                                                               -200                                                                               -400                                                                               200                                   50//50                                                                         FORMULATION VIII//Ba.sub..8 Y.sub..2 RuO.sub.3                                                       N.sub.2 @ 900° C.                                                               3.2K                                                                              +350                                                                               +150                                                                               200                                   50//50                                                                         FORMULATION VIII//Ba.sub..9 Na.sub..1 RuO.sub.3                                                      N.sub.2 @ 900° C.                                                               1.3K                                                                              +500                                                                               +350                                                                               150                                   50//50                                                                         FORMULATION VIII//BaRuO.sub.3                                                                        N.sub.2 @ 900° C.                                                               30K                                                                               -500                                                                               -800                                                                               300                                   60//40                                                                         FORMULATION I//BaRuO.sub.3                                                                           N.sub.2 @ 850° C.                                                               20K                                                                               -400                                                                               -500                                                                               100                                   65//35                                                                         FORMULATION IV//SrRuO.sub.3                                                                          N.sub.2 @ 850° C.                                                               5 M                                                                               -100                                                                               -300                                                                               200                                   75//25                                                                         FORMULATION IV//BaRuO.sub.3                                                                          N.sub.2 @ 850° C.                                                               20 +1400                                                                              +1800                                                                              400                                   65//35                                                                         FORMULATION IV//SrRuO.sub.3                                                                          N.sub.2 @ 850° C.                                                               2 M                                                                               0   -300                                                                               300                                   75/25                                                                          FORMULATION IV//SrRuO.sub.3                                                                          N.sub.2 @ 850° C.                                                               320                                                                               +1120                                                                              +1190                                                                               70                                   70//30                                                                         __________________________________________________________________________

It will be appreciated that the instant specification and claims are set forth by way of illustration and not limitation, and that various modifications and changes may be made without departing from the spirit and scope of the present invention. 

What is claimed is:
 1. A composition for making electrical resistance elements comprising:a. a conductive component which comprises a precious metal oxide of the formula A'_(1-x) A"_(x) B'_(1-y) B"_(y) O₃ wherein A' is Sr or Ba, when A' is Sr, A" is selected from the group consisting of one or more of Ba, La, Y, Ca and Na, and when A' is Ba, A" is selected from the group consisting of one or more of Sr, La, Y, Ca and Na; B' is Ru; B" is selected from the group consisting of one or more of Ti, Cd, Zr, V and Co; O<x<0.2; and O<y<0.2; b. a binder component which comprises(i) between 40 weight percent and 75 weight percent C', wherein C' is SrO when A' is Sr, C' is BaO when A' is Ba, and C' is SrO+BaO when A' is Sr and A" is Ba and when A' is Ba and A" is Sr, (ii) between 20 weight percent and 35 weight percent B₂ O₃, (iii) between 2 weight percent and 15 weight percent SiO₂, and (iv) between 0.5 weight percent and 6.5 weight percent ZnO.
 2. A composition according to claim 1, wherein A' is Sr.
 3. A composition according to claim 1, wherein A' is Ba.
 4. A composition according to claim 1, wherein said binder further comprises between 0.1 and 2.5 weight percent Al₂ O₃.
 5. A composition according to claim 1, wherein C' is between 42 and 58 weight percent, B₂ O₃ is between 27 and 31 weight percent, SiO₂ is between 7 and 11 weight percent and ZnO is between 2 and 4 weight percent.
 6. A composition according to claim 1 wherein said binder further comprises between about 0.1 weight percent and 1.5 weight percent each of one or more oxides selected from the group consisting of Bi₂ O₃, CuO, MgO, and Nb₂ O₅.
 7. A composition according to claim 1, wherein said binder further comprises between 0.1 weight percent and 1.5 weight percent TiO₂.
 8. A composition according to claim 1, wherein said binder further comprises between 0.1 weight percent and 1.5 weight percent NaF.
 9. A composition according to claim 1, wherein said binder further comprises between 5 weight percent and 15 weight percent CaO.
 10. A composition according to claim 1, wherein said binder includes 51.7 weight percent SrO, 30.0 weight percent B₂ O₃, 10.5 weight percent SiO₂, 1.1 weight percent Al₂ O₃, 3.4 weight percent ZnO, 0.5 weight percent Bi₂ O₃, 0.6 weight percent CuO, 0.7 weight percent MgO, 0.5 weight percent Nb₂ O₅, 0.5 weight percent TiO₂ and 0.5 weight percent NaF.
 11. A composition according to claim 1, wherein said binder includes 55.2 weight percent SrO, 30.0 weight percent B₂ O₃, 7.0 weight percent SiO₂, 1.1 weight percent Al₂ O₃, 3.4 weight percent ZnO, 0.5 weight percent Bi₂ O₃, 0.6 weight percent CuO, 0.7 weight percent MgO, 0.5 weight percent Nb₂ O₅, 0.5 weight percent NaF an 0.5 weight percent TiO₂.
 12. A composition according to claim 1, wherein said binder includes 56.6 weight percent SrO, 30.1 weight percent B₂ O₃, 7.1 weight percent SiO₂, 0.5 weight percent Al₂ O₃, 3.4 weight percent ZnO, 0.5 weight percent Bi₂ O₃, 0.6 weight percent CuO, 0.7 weight percent MgO and 0.5 weight percent Nb₂ O₅.
 13. A composition according to claim 1, wherein said conductive component is selected from the group consisting of SrRuO₃, SrRu₀.8 Ti₀.2 O₃, SrRu₀.9 Ti₀.1 O₃, SrRu₀.95 Cd₀.05 O₃, Sr₀.9 Ba₀.1 RuO₃, Sr₀.9 Y₀.1 RuO₃, Sr₀.8 Na₀.1 La₀.1 RuO₃, SrRu₀.8 Zr₀.2 O₃, SrRu₀.9 Zr₀.1 O₃, SrRu₀.75 V₀.25 O₃, SrRu₀.8 Co₀.2 O₃ and SrRu₀.8 Ti₀.1 Zr₀.1 O₃.
 14. A composition according to claim 1, further comprising an organic vehicle.
 15. A composition according to claim 14, wherein said organic vehicle is a mixture of an acrylic ester resin and an alcohol.
 16. A composition according to claim 15, wherein said resin is isobutyl methacrylate and said alcohol is tri-decyl alcohol.
 17. A method of forming an electrical resistance element comprising preparing a composition for making electrical resistance elements comprising combininga. a conductive component which comprises a precious metal oxide of the formula A'_(1-x) A"_(x) B'_(1-y) B"_(y) O₃ wherein A' is Sr or Ba, when A' is Sr, A" is selected from the group consisting of one or more of Ba, La, Y, Ca and Na and when A' is Ba, A" is selected from the group consisting of one or more Sr, La, Y, Ca and Na; and B' is Ru; B" is selected from the group consisting of one or more of Ti, Cd, Zr, V and Co; O<x<0.2; and O<y<0.2, b. a binder component which comprises(i) between 40 weight percent and 75 weight percent C', wherein C' is SrO when A' is Sr, C' is BaO when A' is Ba, and C' is SrO+BaO when A' is Sr and A" is Ba and when A' is Ba and A" is Sr, (ii) between 25 weight percent and 35 weight percent B₂ O₃, (iii) between 2 weight percent and 12 weight percent SiO₂, and (iv) between 0.5 weight percent and 6.5 weight percent ZnO, and c. an organic vehicle to form a paste, thereafter screen printing the paste on a substrate and conducting firing.
 18. A method according to claim 17, wherein A' is Sr.
 19. A method according to claim 17, wherein A' is Ba.
 20. A method according to claim 17, wherein said binder further comprises between 0.1 and 2.5 weight percent, SiO₂ is between 2 and 15 weight percent and ZnO is between 0.5 and 6.5 weight percent.
 21. A method according to claim 17, wherein A'O is between 42 and 58 weight percent, B₂ O₃ is between 27 and 31 weight percent, SiO₂ is between 2 and 15 weight percent and ZnO is between 0.5 and 6.5 weight percent.
 22. A method according to claim 17 wherein said binder further conprises between about 0.1 weight percent and 1.5 weight percent each of one or more oxides of the group consisting of Bi₂ O₃, CuO, MgO, and Nb₂ O₅.
 23. A method according to claim 17, wherein said binder further comprises between 0.1 weight percent and 1.5 weight percent TiO₂.
 24. A method according to claim 17, wherein said binder further comprises between 0.1 weight percent and 1.5 weight percent NaF.
 25. A method according to claim 17, wherein said binder further comprises between 5 weight percent and 15 weight percent CaO.
 26. A method according to claim 17, wherein said binder includes 51.7 weight percent SrO, 30.0 weight percent B₂ O₃, 10.5 weight percent SiO₂, 1.1 weight percent Al₂ O₃, 3.4 weight percent ZnO, 0.5 weight percent Bi₂ O₃, 0.6 weight percent CuO, 0.7 weight percent MgO, 0.5 weight percent Nb₂ O₅, 0.5 weight percent TiO₂ and 0.5 weight percent NaF.
 27. A method according to claim 17, wherein said binder includes 55.2 weight percent SrO, 30.0 weight percent B₂ O₃,7.0 weight percent SiO₂, 1.1 weight percent Al₂ O₃, 3.4 weight percent ZnO, 0.5 weight percent Bi₂ O₃, 0.6 weight percent CuO, 0.7 weight percent MgO, 0.5 weight percent Nb₂ O₅, 0.5 weight percent NaF and 0.5 weight percent TiO₂.
 28. A method according to claim 18, wherein said binder includes 56.6 weight percent SrO, 30.1 weight percent B₂ O₃, 7.1 weight percent SiO₂, 0.5 weight percent Al₂ O₃, 3.4 weight percent ZnO, 0.5 weight percent Bi₂ O₃, 0.6 weight percent CuO, 0.7 weight percent MgO and 0.5 weight percent Nb₂ O₅.
 29. A method according to claim 18, wherein said conductive component is selected from the group consisting of SrRuO₃, SrRu₀.8 Ti₀.2 O₃, SrRu₀.9 Ti₀.1 O₃, SrRu₀.95 Cd₀.05 O₃, Sr₀.9 Ba₀.1 RuO₃, Sr₀.9 Y₀.1 RuO₃, Sr₀.8 Na₀.1 La₀.1 RuO₃, SrRu₀.8 Zr₀.2 O₃, SrRu₀.9 Zr₀.1 O₃, SrRu₀.75 V₀.25 O₃, SrRu₀.8 Co₀.2 O₃ and SrRu₀.8 Ti₀.1 Zr₀.1 O₃.
 30. A method according to claim 17, wherein said organic vehicle is a mixture of an acrylic ester resin and an alcohol.
 31. A method according to claim 29, wherein said resin is isobutyl methacrylate and said alcohol is tri-decyl alcohol.
 32. A method according to claim 17, wherein prior to screen printing, the paste is milled.
 33. A method according to claim 17, wherein the screen printing is on Cu termination.
 34. A method according to claim 17, wherein the substrate comprises Al₂ O₃.
 35. A method according to claim 17, wherein the firing is conducted in a nitrogen atmosphere. 